1.In addition, when the turbomolecular pump is used, the following matters need to be paid attention to:
2.1. In order to prevent the turbomolecular pump from returning oil, the backing pump is pumped to 2 tors before starting, and then the turbomolecular pump is started.
3.2. Between the turbomolecular pump and the backing pump, an oil retaining trap can be strung in to prevent the return of oil vapor from the mechanical pump.
4. The turbomolecular pump cannot be stopped when the backing pump is working (the backing pipe is connected) and the vacuum chamber is in a vacuum state, otherwise the oil vapor will quickly flow back to the clean end of the pump from the backing pipe.
5. When selecting the size of the system's backing pump, the front pump of the turbomolecular pump should be kept in the molecular flow state.
6. The turbomolecular pump cannot be allowed to operate at a speed lower than the rated working speed.
7. The inlet of the molecular pump should be equipped with a protective net to avoid foreign matter entering the pump and damaging the rotor and stator blades.
Hokaido reminds you that the standardized use of turbomolecular pumps can effectively improve the efficiency of vacuum pumps and prolong service life.
The turbomolecular pump is a vacuum pump that uses a high-speed rotating moving impeller to transfer momentum to the gas molecules, so that the gas produces a directional flow and the pumping. Turbomolecular pumps are characterized by fast start-up, resistance to radiation of various rays, resistance to atmospheric impact, no gas storage and desorption effect, no oil vapor pollution or little pollution, and can obtain a clean ultra-high vacuum; During operation, the high pumping speed is not affected by the intrusion of high loads or impurity gases.
Turbomolecular pumps are widely used in manufacturing processes that require high vacuum levels such as high energy accelerators, controlled thermonuclear reactors, heavy particle accelerators, and vacuum coatings.
Hokaido turbomolecular pump is a complete turbomolecular pump product with a pumping speed of between 10-2700 liters per second, which has a high cost performance and a more flexible installation method. To learn more, please contact Good CapitaLand.