Dongguan Yazreid electromechanical technology co., LTD. Has a complete range of Turbo - M molecular pumps and Turbo - FF molecular pumps ranging from 10 to 2,700 l/s.The product has high cost performance and flexible installation.The proven bearing system provides more optimal reliability.It is mainly used in vacuum exhaust platform, material purification, vacuum furnace, vacuum sintering, vacuum coating industry, laboratory application and other fields.
Turbo molecular pump (turbomolecular pump) is a kind of mechanical vacuum pump which obtains ultra-high vacuum by high speed rotating rotor with gas molecules.The operating pressure range is 1Pa-- 10-8pa, and the extraction rate is generally below 5000L/s.The advanced pump can obtain the ultimate pressure of 10-9pa, the pump speed is 10000r/min--50000r/min, this pump has a wide range of pumping speed, with a constant pumping speed between nine f-levels.Molecular pumps are mainly used as ultra-high vacuum pumps and high vacuum pumps, but it can not directly exhaust the atmosphere, need to be equipped with the front stage pump, and its main performance (such as limit pressure and pumping speed) and the configuration of the front stage pump capacity, revolution, the type of gas pumped.The pumping speed of the molecular pump is larger for the lighter air rest, and the pumping speed for the group is 20% higher than that for the air.Based on the successful horizontal turbomolecular pump developed in the 1960s, two kinds of vertical turbomolecular pumps with milling and twisting blades were quickly developed.110 l/s pumping speed range, 150 l/s, 450 l/s, 550 l/s, 600 l/s, 1200 l/s, 1500 l/s and the 3500 l/s, and other specifications.China has formulated the industrial standard of vertical turbomolecular pump (JB/T 9125-95) and the national standard of side test method of turbomolecular pump performance (gb7774-87), and applied magnetic suspension bearing in turbo molecular pump.
In recent 10 years, because of the bearing and high speed rotation and the continuous development of numerical control processing technology, make the international system of turbo molecular pump, which has made great progress, the pumping speed from 50 l/s has grown to 25000 l/s (Japan) and even up to 40000 l/s (Russia).In all kinds of vacuum pumps with mechanical motion, molecular pump is a kind of pump with precise structure and high process requirements.The geometry of the dynamic and static blades of the pump has a great relationship with the pumping speed.At the same time, the rotor is required to have a good dynamic balance, the moving blade should have high strength to withstand the centrifugal force generated by high-speed rotation, to ensure the reliable operation of the pump.
The molecular pump is driven directly by the intermediate frequency motor inside the pump body, and the turbine rotor is an integral structure.The pump has a high compression ratio to the gas with large molecular weight, and the intermediate frequency motor is placed in the front space, so that the high vacuum and ultra-high vacuum can be obtained.Its performance characteristics are as follows: compact structure, wide working pressure range, stable pumping speed in the range of 10-1pa-10-7pa;The work is stable. Due to the use of precision bearing, strict dynamic balancing process and a series of vibration reduction measures, the pump has low vibration, low noise and short start-up time. Generally, the pump can reach full pumping speed within 4min to 15min.Standardized flange connection size, vertical structure, so that it is easy to connect with the vacuum system.
With the continuous improvement of the structure of turbomolecular pump, it is more and more widely used.There has been a tendency to replace oil diffusion pumps in some applications.It is suitable for high vacuum and ultra-high vacuum instruments that require cleaning, such as high energy accelerator, nuclear fusion reaction device, aerospace simulation, vacuum coating, vacuum smelting, semiconductor purification, large vacuum tube exhaust, etc.
At present, the maglev turbomolecular pump has reached the practical level, which makes the turbomolecular pump develop towards the direction of high flow and high outlet pressure.In this way, the molecular pump is not only used in the extremely high and ultra-high vacuum range, but also in the high and medium vacuum range.Has become the main equipment to obtain clean vacuum (such as the emergence of dry molecular pumps), the application field is expanding.
The best combination of good cade turbomolecular pump and front stage pump;To achieve the maximum range of applications.Modular design provides simple customization services for related applications.Easy maintenance, thanks to the good accessibility of individual components.Integrated drive electronics;No additional control system is required."Plug and play" - no installation or wiring required.Strong engineering characteristics result in long service life and high reliability.Front vacuum relief valve (optional) prevents the receiving device from venting in the event of power failure.Direct connection of vacuum gauge is possible.