The 2021 screw vacuum pump caught fire because of the rapid development of the semiconductor industry

Thanks to the blowout development of the semiconductor industry, screw vacuum pumps are on fire!

After a shift from the United States to Japan in the 1970s and to South Korea and Taiwan in the 1980s, the semiconductor industry is now undergoing its third shift to Chinese mainland. At present, China has a global large-scale, fast-growing integrated circuit consumer market. Thanks to the huge consumer market and strong support from national industrial policies, domestic integrated circuit manufacturers have increased their investment in Chinese mainland to expand their production capacity.
 
Dry vacuum pumps are essential general purpose devices in semiconductor processes for cleaning or demanding processes such as single crystal pull crystal, Load-Lock, etching, CVD, atomic layer deposition (ALD), packaging, testing, etc.

The vacuum system required in the manufacturing process of semiconductor products requires the removal of corrosive gases, dust particles, toxic gases, etc., so a dry screw vacuum pump is a very good choice.

The key advantages of dry vacuum pumps for the semiconductor industry are:
1. Eliminate the risk of process contamination of oil or oil being carried into the exhaust gas treatment system
2. No waste or contamination of valuable solvents, products or the environment
3. It is completely dry and does not pollute the upstream and downstream processes
4. No corrosion will occur in the dry vacuum pump
5. More efficient and consume less electricity
6. Inhaled solvents or other useful ingredients can be recycled directly at the outlet of the pump
 
Hokaido's RKB/RKD dry screw pump, turBO-M series molecular pumps, is a vacuum pump designed specifically for the semiconductor industry.

RKB/RKD dry screw pump, with low operating power, low noise, pumping speed and so on.
According to the process / environmental needs of water-cooled, air-cooled and explosion-proof motor
Air-cooled motor models can be combined with self-circulating cooling systems and can be used in environments without cooling water systems
According to different needs of the optional Lu-type pumping, pumping rate of up to 3500m3/h
TURBO-M series molecular pumps
Pumping speed is between 10-2700 l/s
High cost-effective and flexible installation methods
High pumping speed is not affected by high loads or impurity gas intrusion

These are a brief introduction to the dry and molecular pumps used by Hokaido for the semiconductor industry, and we need to know more, please contact us.